Vapor Deposition of Tungsten by Hydrogen Reduction of Tungsten Hexafluoride

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (6) , 561
• https://doi.org/10.1149/1.2426649

Abstract

Keywords

• TUNGSTEN HEXAFLUORIDE
• HYDROGEN REDUCTION
• DEPOSITION OF TUNGSTEN
• VAPOR
• REDUCTION OF TUNGSTEN
• TUNGSTEN BY HYDROGEN