Characterization of Oxide Growth at High Temperatures and Low Pressures from Silane/Nitrous Oxide Reaction
- 1 December 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (12) , 2975-2980
- https://doi.org/10.1149/1.2113706
Abstract
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