Calibrated measurements of elastic limit, modulus, and the residual stress of thin films using micromachined suspended structures
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
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- A technique for the determination of stress in thin filmsJournal of Vacuum Science & Technology B, 1983