MOSFET Ultrasonic Surface-Wave Detectors for Programmable Matched Filters
- 1 August 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 19 (3) , 58-60
- https://doi.org/10.1063/1.1653821
Abstract
The piezoresistance effect in Si MOSFET p‐channel inversion layers is utilized for the detection of elastic surface waves. Theoretical results for detector sensitivity are described. It is shown that arrays of such detectors can be used for programmable surface‐wave signal processing. Variable delay‐line operation and the correlation of phase‐coded waveforms are demonstrated.Keywords
This publication has 5 references indexed in Scilit:
- Evaluation of Digitally Coded Acoustic Surface-Wave Matched FiltersIEEE Transactions on Sonics and Ultrasonics, 1971
- LOW ACOUSTIC LOSS CHALCOGENIDE GLASSES— A NEW CATEGORY OF MATERIALS FOR ACOUSTIC AND ACOUSTO-OPTIC APPLICATIONSApplied Physics Letters, 1970
- Surface elastic wavesProceedings of the IEEE, 1970
- Mobility Anisotropy and Piezoresistance in Silicon p-Type Inversion LayersJournal of Applied Physics, 1968
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954