Effects of ion implantation on surface composition and enhanced etching in LiNbO3
- 1 September 1991
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 10 (1) , 19-24
- https://doi.org/10.1016/0921-5107(91)90089-e
Abstract
No abstract availableKeywords
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