Effect of Doping with Nitrogen and Boron on Cathodoluminescence of CVD-Diamond

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Abstract
We have investigated cathodoluminescence (CL) of nitrogen- and boron-doped CVD diamonds compared with type Ib and undoped CVD diamonds. The CL spectrum of nitrogen-doped CVD diamond shows some luminescent centers, which are not observed in undoped one. Especially 2.15 eV (575 nm) and 1.67 eV (GRl) centers are prominent. CVD diamond doped with both nitrogen and boron shows a similar CL spectrum to boron-doped CVD diamond at lower concentration of nitrogen, and shows a spectrum composed of the centers obtained by nitrogen-doping and by boron-doping at higher concentration of nitrogen. Highenergy electron irradiation to nitrogen-doped CVD diamond produces an intense luminescent center having a zero-phonon line at 3.19 eV, and the following annealing make the emission of 2.15 eV center much more intense.