High Speed and High Precision STM Combined with SEM.

• 1 January 1992
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 58  (9) , 1490-1495
• https://doi.org/10.2493/jjspe.58.1490

Abstract

Keywords

• SEM
• HIGH SPEED AND HIGH
• PRECISION STM
• STM COMBINED
• HIGH PRECISION