Rutherford Backscattering in an industrial environment
- 1 May 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 10-11, 600-605
- https://doi.org/10.1016/0168-583x(85)90317-9
Abstract
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This publication has 1 reference indexed in Scilit:
- Transmission electron microscopy and Rutherford backscattering studies of different damage structures in P+ implanted SiJournal of Applied Physics, 1980