Invited Paper Is SOI Ready For Circuits Applications?

Publisher Website
Google Scholar
Abstract
Silicon On Insulator technology is now reaching the point of actual application to a medium size circuit market. Three approaches have been extensively explored in order to obtain more or less defect-free SOI 4 in. wafers: zone melting recrystallization, formation and oxidation of porous-Si, and oxygen implantation. We review the advantages and drawbacks of these techniques and some electrical results obtained on circuits made on these SOI materials.

This publication has 0 references indexed in Scilit: