A new computer designed faraday system for high current ion implantation systems
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1) , 354-359
- https://doi.org/10.1016/0168-583x(87)90856-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Performance characteristics of the extrion 160-10 ion implantation systemNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- A technique for optimizing the dose uniformity of a magnetic scanning high current implanterNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Historical perspective and future trends for ion implantation systemsNuclear Instruments and Methods in Physics Research, 1981