25 nm chromium oxide lines by scanning tunneling lithography in air

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3720-3724
• https://doi.org/10.1116/1.587430

Abstract

Keywords

• NM CHROMIUM
• CHROMIUM OXIDE
• TUNNELING LITHOGRAPHY
• OXIDE LINES
• SCANNING TUNNELING