Experiment on first-wall carbon coating: Focusing hydrogen concentration
- 1 July 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 5 (4) , 2297-2300
- https://doi.org/10.1116/1.574439
Abstract
As a back-up experiment for investigations on first-wall carbon coatings of toroidal machines, we constructed the RIKEN ECR-2 device and carried out simulation experiments. By electron cyclotron resonance discharges we obtain an amorphous, hard, and dense carbon film. It is possible to decrease the atomic H/C ratio of carbon films by high-energy ion bombardment. Harmful carbon films deposited on observation windows can be cleaned up by a local pure hydrogen plasma.Keywords
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