Smart sensors

This publication has 6 references indexed in Scilit:

• Resonant-microbridge vapor sensor
  IEEE Transactions on Electron Devices, 1986
• Integrated Circuit Implantable Telemetry Systems
  IEEE Engineering in Medicine and Biology Magazine, 1983
• Capacitive pressure transducers with integrated circuits
  Sensors and Actuators, 1983
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• Micromechanical accelerometer integrated with MOS detection circuitry
  IEEE Transactions on Electron Devices, 1982
• Solid state: Silicon sensors meet integrated circuits: The combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile
  IEEE Spectrum, 1981