Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Finite element simulation of indentation experimentsPublished by Elsevier ,2003
- Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin filmsJournal of Materials Research, 1988
- A method for interpreting the data from depth-sensing indentation instrumentsJournal of Materials Research, 1986
- Calculated elastic constants for stress problems associated with semiconductor devicesJournal of Applied Physics, 1973