Role of solvents in chemical vapor deposition: implications for copper thin-film growth
- 1 November 1993
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 97 (45) , 11781-11786
- https://doi.org/10.1021/j100147a035
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: