Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency
- 1 July 2003
- journal article
- Published by Elsevier in Journal of Fluorine Chemistry
- Vol. 122 (1) , 63-80
- https://doi.org/10.1016/s0022-1139(03)00081-2
Abstract
No abstract availableKeywords
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