The scanning tunneling microscopy combined with the scanning electron microscopy—A tool for the nanometry
- 1 March 1991
- journal article
- research article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (2) , 618-622
- https://doi.org/10.1116/1.585471
Abstract
Two scanning tunneling microscopes (STMs) compatible with scanning electron microscope or optical microscope are presented. One STM is based on bimorph piezos and has a scanning range of about 10-mu-m. The other STM is based on a solid piezoblock with frequencies higher than 8 kHz and with a scanning range of about 3-mu-m. Some results demonstrate the capabilities of these microscopes. Among them are the observations of the microbridge, of the grain boundary in twinned crystal, the imaging of topography, and tunneling current distribution on the cleaved multilayer GaAs-AlGaAs structure.Keywords
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