State-of-the-Art in Microfabrication of SAW Devices

• 1 January 1975
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 458-462
• https://doi.org/10.1109/ultsym.1975.196560

Abstract

Keywords

• SURFACE ACOUSTIC WAVE DEVICES
• FREQUENCY
• ELECTRON BEAMS
• OPTICAL DEVICE FABRICATION
• OPTICAL MICROSCOPY
• ELECTRON OPTICS
• TRANSDUCERS
• OPTICAL IMAGING
• PRINTING
• SURFACE ACOUSTIC WAVES