A New Concept Of An RF-Excited CO 2 -Laser With Solid State Generators

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Abstract
A new concept of a laser head with successfully integrated optical path, discharge tubes, gas delivery tubes and resonator rods has been developed. This laser contains eight discharge tubes each energized by a 1 kW solid state generator at a frequency of 13.56 MHz. With an input power of 4.68 kW a laser power of more than 860 W has been obtained in a non optimized state of operation. This output power entails a plasma efficiency of 19%.

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