Elastic and inelastic surface effects on ion penetration and the resulting sputtering and backscattering
- 1 March 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 13 (1-3) , 225-229
- https://doi.org/10.1016/0168-583x(86)90507-0
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Surface Effects on Sputtered Atoms and Their Angular and Energy DependenceFusion Technology, 1985
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Monte Carlo Simulations on Scattering of Bombarded Ions in SolidsJapanese Journal of Applied Physics, 1972
- Ranges of Energetic Atoms in SolidsJournal of Applied Physics, 1963