Recovery Processes of Si (111) and Ge (111) Surfaces Damaged by Argon Ion Bombardment

• 1 September 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (9) , 1675-1676
• https://doi.org/10.1143/jjap.17.1675

Abstract

Keywords

• RECOVERY PROCESSES
• ARGON ION
• ION BOMBARDMENT
• SURFACES DAMAGED