Composition Control of InSb Thin Films by ECR Sputtering.

• 1 January 1993
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 36  (3) , 357-359
• https://doi.org/10.3131/jvsj.36.357

Abstract

Keywords

• THIN FILMS
• COMPOSITION CONTROL
• ECR SPUTTERING
• INSB THIN