Ultrabroadband terahertz field detection by proton-bombarded InP photoconductive antennas

Abstract
Photoconductive (PC) antennas fabricated on InP bombarded with 180 keV protons of different dosages (InP:H+) all exhibit a useful bandwidth of about 30 THz, comparable to that of the LT-GaAs PC antenna. The peak signal current of the best InP: H+ device (dosage of 1015 ions/cm2) is slightly higher than that of the LT-GaAs one, while the signal-to-noise ratio (SNR) of the former is about half of that of the latter due to lower resistivity. This suggests that InP: H+ can be a good substrate for THz PC antennas with proper annealing and/or implantation recipe.

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