Deep-UV Liquid Immersion Mastering of High Density Optical Discs

• 28 February 2003
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 42  (Part 1, No) , 1110-1112
• https://doi.org/10.1143/jjap.42.1110

Abstract

Keywords

• DEEP UV
• IMMERSION MASTERING
• OPTICAL
• UV LIQUID IMMERSION
• DISCS