Abstract
I–III–VI2 compounds in general and CuInSe2 (CIS) in particular are important photovoltaic materials. Among the various thin film deposition techniques that have been employed for CIS film growth, so far only three-source evaporation and the two-stage method have yielded films that could be used for high efficiency solar cell fabrication. In this paper we briefly review some of these thin film deposition techniques and describe a two-stage method that gives high quality CIS films with uniform morphology and stoichiometry.

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