Silicon-on-insulator photonic integrated circuit (SOI-PIC) technology
- 23 January 1997
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2997, 60-72
- https://doi.org/10.1117/12.264133
Abstract
This paper describes the application of the silicon-on- insulator (SOI) technology as a platform for low cost guided-wave optics. Recent progress in material and device technologies are reviewed and results on multimode interference couplers, thermo-optics switches, and phased array wavelength filters in SOI are presented.Keywords
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