Polarimetry of Specular and Non-Multiple-Scattered Electromagnetic Radiation from Selectively Roughened Si Surfaces

Publisher Website
Google Scholar
Abstract
We show by application to Si that polarimetric measurements on radiation reflected nonspecularly from rough surfaces can distinguish between geometric-optics (facet or tangent-plane) and Rayleigh-Fano (random diffraction grating) scattering models, thus providing new details about surface roughness. A class of macroscopically rough but microscopically smooth surfaces is found that gives accurate specular ellipsometric data while being unsuitable for reflectance measurements.