A Polymer Microdisk Photonic Sensor Integrated Onto Silicon
- 23 October 2006
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 18 (20) , 2096-2098
- https://doi.org/10.1109/lpt.2006.883210
Abstract
Optical sensors are attractive for integrated chip-scale sensor systems. In this letter, integrated microdisk sensors have been fabricated and characterized for five different D-glucose concentrations in deionized water. The microdisk sensor reported is in an orthogonal configuration, reducing the sensor size toward chip-scale sensor applications. The measured wavelength shift in the resonant peak of the microdisk sensors has a linear response as a function of D-glucose concentration. The estimated sensitivity (defined by Deltalambdaresonant/wt%D-glucose) of the fabricated microdisk sensor for the D-glucose solution was 0.12[nm/wt%] based on the slope of the linear regression line from the measured resultsKeywords
This publication has 15 references indexed in Scilit:
- Unidirectional laser emission from polymer-based spiral microdisksApplied Physics Letters, 2005
- Polymer microresonator strain sensorsIEEE Photonics Technology Letters, 2005
- Add-drop filters utilizing vertically coupled microdisk resonators in siliconApplied Physics Letters, 2005
- Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radiusIEEE Journal of Selected Topics in Quantum Electronics, 2005
- Polymeric optical waveguides using direct ultraviolet photolithography processApplied Physics A, 2005
- Simultaneous Quantitative Determination of Benzene, Toluene, and Xylenes in Water Using Mid-Infrared Evanescent Field SpectroscopyAnalytical Chemistry, 2004
- Free-standing all-polymer microring resonator optical filterElectronics Letters, 2003
- Microdisk lasers vertically coupled to output waveguidesIEEE Photonics Technology Letters, 2003
- Microdisk tunable resonant filters and switchesIEEE Photonics Technology Letters, 2002
- Integrated optical pH sensor using replicated chirped grating coupler sensor chipsSensors and Actuators B: Chemical, 1998