The variation of in islands on InP surface versus ion sputtering angle observed by the electron energy loss spectroscopy
- 1 January 1985
- journal article
- Published by IOP Publishing in Chinese Physics Letters
- Vol. 2 (1) , 31-34
- https://doi.org/10.1088/0256-307x/2/1/009
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Surface modifications due to preferential sputteringApplications of Surface Science, 1982
- New method of preparing (100) InP surfaces for schottky barrier and ohmic contact formationJournal of Electronic Materials, 1980
- SIMS evaluation of contamination on ion-cleaned (100) InP substratesApplied Physics Letters, 1977