Crystallinity and Morphology of Superconducting Thin Films Prepared by Sputtering
- 1 March 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (3A) , L441
- https://doi.org/10.1143/jjap.28.l441
Abstract
HoBaCuO superconducting thin films were prepared on MgO substrates by rf magnetron sputtering. The crystallinity and morphology of the thin films have been investigated. An amorphous thin film was crystallized by postannealing at 900°C, while an epitaxial grown thin film was obtained by substrate heating at more than 600°C.Keywords
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