Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge III: Effect of rare gases
- 1 August 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 189 (2) , 313-319
- https://doi.org/10.1016/0040-6090(90)90460-u
Abstract
No abstract availableKeywords
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