Damage and contamination free fabrication of thin Si wires with highly controlled feature size
- 1 June 1997
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 117-118, 684-689
- https://doi.org/10.1016/s0169-4332(97)80164-x
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
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