Monolithic Goniometer for Pure Rotation and Fine Orientation Control
- 1 June 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (6R)
- https://doi.org/10.1143/jjap.21.955
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Piezodriven 50-μm range stage with subnanometer resolutionReview of Scientific Instruments, 1978