Roughness Parameters of Surfaces by Atomic Force Microscopy

• 1 January 1995
• journal article
• Published by Elsevier in CIRP Annals
• Vol. 44  (1) , 517-522
• https://doi.org/10.1016/s0007-8506(07)62376-2

Abstract

Keywords

• ROUGHNESS
• ATOMIC FORCE MICROSCOPY
• 3D SURFACE TOPOGRAPHY
• COPPER
• SURFACE TEXTURE
• SCANNING PROBE MICROSCOPY
• FOURIER ANALYSIS
• THREE DIMENSIONAL
• SURFACE TOPOGRAPHY