Diamond-like carbon thin film deposition using a magnetically confined r.f. PECVD system
- 1 May 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (7) , 977-983
- https://doi.org/10.1016/0925-9635(94)00266-5
Abstract
No abstract availableKeywords
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