Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror
- 7 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.Keywords
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