Energy Distribution of Positive Ions Extracted from anRFPlasma
- 15 July 1969
- journal article
- Published by Physical Society of Japan in Journal of the Physics Society Japan
- Vol. 27 (1) , 270
- https://doi.org/10.1143/jpsj.27.270
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Extraction of Positive Ions from Electrodeless DischargeReview of Scientific Instruments, 1966
- Excess Energy Measurement of Ion Beam from High Frequency Ion SourceJapanese Journal of Applied Physics, 1966
- Energy Anomalies Observed in Ion Beams Produced by rf SourcesReview of Scientific Instruments, 1962