Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling Microscopy
- 1 April 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (4A) , L553
- https://doi.org/10.1143/jjap.32.l553
Abstract
A titanium (Ti) surface was arbitrarily oxidized by a scanning tunneling microscope (STM). Oxidation of the Ti surface was induced by scanning an STM tip with the sample (Ti) bias of more than +3 V, and a dot or line pattern of oxide was fabricated on Ti with the spatial resolution of 70 nm. The results were discussed in terms of tip-induced anodization of Ti due to water adsorbed on the surface.Keywords
This publication has 9 references indexed in Scilit:
- Photoexcitation Effects on Scanning Tunneling Microscope Images of Surface Oxide Layer of TitaniumJapanese Journal of Applied Physics, 1992
- Modification of HF-treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditionsApplied Physics Letters, 1992
- Integration of scanning tunneling microscope nanolithography and electronics device processingJournal of Vacuum Science & Technology A, 1992
- Tip–sample forces in scanning probe microscopy in air and vacuumJournal of Vacuum Science & Technology A, 1992
- Switch to atom controlNature, 1991
- Pattern generation on semiconductor surfaces by a scanning tunneling microscope operating in airJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Modification of tantalum surfaces by scanning tunneling microscopy in an electrochemical cellJournal of Vacuum Science & Technology A, 1990
- Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in airApplied Physics Letters, 1990
- Breakdown and Efficiency of Anodic Oxide Growth on TitaniumJournal of the Electrochemical Society, 1978