Measurement of Ultrathin (<100 Å) Oxide Films by Multiple‐Angle Incident Ellipsometry
- 1 June 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (6) , 1756-1761
- https://doi.org/10.1149/1.2085868
Abstract
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