Ion spectroscopy gauge: Total pressure measurements down to 10−12 Pa with discrimination against electron-stimulated-desorption ions
- 1 September 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (5) , 3333-3339
- https://doi.org/10.1116/1.577821
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: