CO2 laser drilling of copper following excimer laser pretreatment
- 12 March 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (11) , 996-998
- https://doi.org/10.1063/1.102574
Abstract
Efficient CO2 laser drilling of copper sheet has been obtained following pretreatment with excimer laser radiation at intensities of (1–2)×106 W cm−2. The present studies show a significant reduction in the laser pulse energy, pulse duration, and gas assist parameters required to drill copper sheets with thicknesses of up to 1 mm. Optimization of laser drilling under these conditions involves a material removal regime that differs from that obtained at high laser intensity when drilling untreated surfaces.Keywords
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