Thermal-capillary analysis of Czochralski and liquid encapsulated Czochralski crystal growth
- 1 April 1986
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 74 (3) , 605-624
- https://doi.org/10.1016/0022-0248(86)90208-3
Abstract
No abstract availableKeywords
This publication has 43 references indexed in Scilit:
- Comparison of finite element calculations and experimental measurements in edge-defined film-fed growth of silicon sheetsJournal of Crystal Growth, 1984
- Czochralski growth of siliconJournal of Crystal Growth, 1983
- Finite-element simulation of Czochralski bulk flowJournal of Crystal Growth, 1983
- Analysis of operating limits in edge-defined film-fed crystal growthJournal of Crystal Growth, 1983
- Temperature profile and thermal stress calculations in GaAs crystals growing from the meltJournal of Crystal Growth, 1983
- Czochralski silicon pull rate limitsJournal of Crystal Growth, 1981
- Theory of molten zone shape and stabilityJournal of Crystal Growth, 1977
- The edge-defined film-fed growth of controlled shape crystalsJournal of Crystal Growth, 1977
- The meniscus in Czochralski growthJournal of Crystal Growth, 1974
- Macroscopic Interface Shape During SolidificationJournal of Heat Transfer, 1966