High Frequency AO Bragg Deflector Using a Single-Crystal ZnO Thin Film

Abstract
This report describes acoust-optic (AO) Bragg deflectors using ZnO thin film. The single-crystal ZnO films on sapphire have been grown by RF magnetron sputtering and measured to have about 1.2 dB·cm-1 attenuation for guided 0.63 µm laser light and to have about 4% mechanical coupling coefficient, k2, for 1st order mode of SAW. These excellent properties of ZnO film have realized a high diffraction efficiency of 50% with 1 W input power of SAW at about 1 GHz on AO Bragg deflector. The suitable design of interdigital transducers (IDT) will make it possible to realize the wideband AO Bragg deflector.

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