Focused ion beam micromachined three-dimensional features by means of a digital scan

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1361-1365
• https://doi.org/10.1116/1.585078

Abstract

Keywords

• THREE DIMENSIONAL
• FOCUSED ION BEAM