RF Probe Method for Space Potential Measurement in Medium Pressure Plasmas

• 1 July 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (7) , 1287-1288
• https://doi.org/10.1143/jjap.16.1287

Abstract

Keywords

• POTENTIAL MEASUREMENT
• RF PROBE
• SPACE POTENTIAL
• PROBE METHOD
• MEDIUM PRESSURE PLASMAS
• MEASUREMENT IN MEDIUM