Organic patch sensor for electro-optic measurement of electrical signals in integrated circuits
- 23 May 1991
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 27 (11) , 932-934
- https://doi.org/10.1049/el:19910583
Abstract
A highly sensitive, versatile and low-cost electric field sensor has been developed for measuring internal electrical signals in integrated circuits using an electro-optic sampling technique. This sensor uses an organic nonlinear optical (NLO) polymer coated on thin polyimide films and is directly bonded to the circuit under test without a mirror coating. Electro-optic sampling was conducted using the sensor, and a voltage sensitivity of less than a few tens of millivolts was obtained.Keywords
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