Dependence of Equilibria in the Modified Chemical Vapor Deposition Process on SiCl4, GeCl4, and O2
- 1 June 1984
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 67 (6) , 420-424
- https://doi.org/10.1111/j.1151-2916.1984.tb19728.x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Heats of formation of germanium tetrafluoride and of the germanium dioxidesTransactions of the Faraday Society, 1966