Stress variation with temperature/time and its correlation to film structure and deposition parameters
- 1 July 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 9 (4) , 2453-2458
- https://doi.org/10.1116/1.577255
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: