Sputtering and chemical vapour deposition of piezoelectric ZnO, AlN and K3Li2Nb5O15 films for optical waveguides and surface acoustic wave devices
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (2) , 129-140
- https://doi.org/10.1016/0040-6090(82)90611-3
Abstract
No abstract availableThis publication has 26 references indexed in Scilit:
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