Epitaxial Growth of Silicon from the Pyrolysis of Monosilane on Silicon Substrates

• 1 January 1963
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 110  (12) , 1235
• https://doi.org/10.1149/1.2425632

Abstract

Keywords

• EPITAXIAL GROWTH
• SILICON SUBSTRATES
• GROWTH OF SILICON
• PYROLYSIS OF MONOSILANE